Chapter 1 Introduction to Silicon Carbide ( Sic ) Microelectromechanical Systems ( Mems )
نویسنده
چکیده
This chapter serves as a brief introduction to the basic properties of silicon carbide (SiC) and the advantages of using SiC over other semiconductor materials for microelectromechanical systems (MEMS). Given the excellent and extensive review chapters that follow this one, I have confined this chapter to recent research performed at the University of Edinburgh in the area of SiC microelectromechanical systems (MEMS). Some of the processes involved in the fabrication of microelectromechanical systems in SiC are discussed, together with the problems to be overcome in order for SiC's potential as a MEMS material be exploited in applications for harsh environments.
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